Optical photomask
Our research-grade optical photomasks are designed to meet the precision requirements of academic cleanrooms, semiconductor fabs, and advanced research labs. Manufactured using high-uniformity chromium coatings on polished quartz or soda-lime substrates, these masks deliver 1–5 µm resolution, excellent dimensional accuracy, and low defect levels — ideal for teaching labs, microfluidic chip development, device prototyping, and lithography training.
We accept GDSII, DXF, and Gerber files and provide rapid design verification to help students, researchers, and fabrication engineers quickly translate their layouts into ready-to-use photomasks. We can also process hand-drawn figures, provided you supply a clear and detailed description of your requirements. Whether you are running a microfabrication course, developing new semiconductor devices, or conducting cutting-edge materials research, our custom masks offer the reliability and precision required for repeatable lithographic results.
Photomask Specifications
- Material: High-quality quartz or soda-lime glass
- Coating: Chromium (Cr) with optional anti-reflection coating
- Resolution: Down to 1–5 µm depending on pattern complexity
- Critical dimension tolerance: ±0.5–1 µm
- Feature types: Lines, grids, microchannels, electrodes, logos, IC layouts
- Mask sizes: 2", 3", 4", 5", 7", 9", 12" or fully custom sizes
Frequently Asked Questions (Optical Photomask)
1. What types of photomasks do you offer?
We provide a full range of optical and lithography masks:
• Chrome-on-glass photomasks (standard)
• Quartz photomasks (high-resolution & UV applications)
• Film photomasks (polyester or Mylar) — economical option
• DUV masks for deep-UV stepper processes
Resolution ranges from 1–10 µm for standard processes to sub-micron for advanced lithography.
2. What is the minimum feature size you can achieve?
Our photomask process supports:
• 1–2 µm minimum feature size (standard chrome mask)
• 0.5–1 µm (high-precision process)
• < 0.3 µm (special order / e-beam written masks)
The final resolution depends on the material, process type, and pattern density.
3. What file formats do you accept for mask fabrication?
Supported design formats:
• GDSII (preferred for semiconductor layouts)
• DXF
• Gerber
• Illustrator / SVG (converted by us)
If you only have a drawing or sketch, our engineers can convert it into mask-ready GDS files.
4. What substrate sizes are available?
Common options:
• 3″ × 3″
• 4″ × 4″
• 5″ × 5″
• 6″ × 6″
Thickness typically ranges from 0.09″ to 0.12″ (2.2–3.0 mm). Custom sizes are available upon request.
5. What is the mask polarity and tone?
Available options:
• Positive tone: Clear features on dark background
• Negative tone: Dark features on clear background
If you're unsure which tone you need, share your photoresist/process info — our engineers can match the correct polarity.
6. Can the photomask be used with UV lithography systems?
Yes — masks are compatible with:
• UV mask aligners
• Contact / proximity lithography systems
• Projection lithography (depending on resolution)
Quartz masks are recommended for 365 nm / 248 nm / 193 nm UV applications.
7. What surface finishes are available?
Standard coating:
• Chrome (Cr)
Optional add-ons:
• Anti-reflection coatings
• Hard carbon protection layer
These improve durability and reduce scattering during UV exposure.
8. How durable is the photomask? Can it be reused?
Chrome-on-glass masks are extremely durable and can withstand:
• Many repeated exposures
• Standard cleaning
• Solvents used in lithography labs
Film masks are cheaper but not recommended for high-resolution work or long-term reuse.
9. What is the typical lead time?
Standard delivery:
• 3–5 business days (chrome mask)
• 1–2 weeks (high-resolution or quartz mask)
• 2–3 weeks (DUV or e-beam written masks)
10. How do I request a quote?
Click the "Request Quote" button and include:
• GDS/DXF file
• Required resolution & tone
• Substrate size & thickness
• Application (UV lithography, microfluidics, MEMS, etc.)
Our engineers will confirm design compatibility and send pricing within 24 hours.