How do I choose or design a custom vacuum chamber?

To design a custom vacuum chamber, define the vacuum level, choose a suitable material such as stainless steel, select KF or CF flanges, plan internal mounts, and consider optical access, pumps, and safety interlocks. Port layout, chamber dimensions, and feedthroughs should match the application such as thin-film deposition or spectroscopy.

Which vacuum pumps are needed for thin-film deposition?

Thin-film processes such as thermal evaporation and sputtering typically require a turbo molecular pump backed by a rotary or dry scroll pump to reach 10⁻⁵–10⁻⁶ Torr.

Can a custom vacuum chamber include heaters and optical windows?

Yes. Custom vacuum chambers can integrate heaters, quartz or sapphire optical windows, manipulators, shadow mask holders, gas inlets, electrical feedthroughs, and viewports as needed for scientific applications.

What information should I provide when ordering a custom vacuum chamber?

Customers should provide the chamber dimensions, target vacuum level, flange type (KF or CF), number of ports, internal mounts, pumping configuration, materials required, and the intended application such as sputtering, evaporation, spectroscopy, or CVD.

How to Choose or Design a Custom Vacuum Chamber | Guide for Research Labs & R&D Systems

Q: What material is best for vacuum chambers?

304 stainless steel is preferred for most R&D vacuum chambers due to its cost-performance and compatibility with high vacuum. 316 stainless steel is used for corrosive environments, aluminum for lightweight optical systems, and titanium for UHV applications.

December 11, 2025

How to Choose or Design a Custom Vacuum Chamber (Research Lab Guide)

Vacuum chambers are the core of many scientific instruments, including:

Thin-film deposition (thermal evaporation, sputtering, e-beam)
Laser spectroscopy & LIBS systems
High-purity gas experiments
Surface science & plasma diagnostics
CVD / ALD / PVD
In-situ microscopy or optical probing

Most research labs require chambers with non-standard shapes, port configurations, flange sizes, or internal mounts, which makes custom design essential.

This guide explains how to select materials, port layouts, pumps, feedthroughs, and structural requirements.

Step 1 — Choose the Chamber Material

Material	Vacuum Level	Pros	Cons	Typical Use
304 Stainless Steel	10⁻⁶ Torr	Low cost, strong, weldable	Slight magnetic	Most R&D chambers
316 Stainless Steel	10⁻⁸ Torr	Corrosion-resistant	Higher cost	UHV & reactive gases
Aluminum (6061-T6)	10⁻⁶ Torr	Lightweight, easy to machine	Scratches, oxidation	Optical/laser systems
Quartz/Sapphire	10⁻⁶ Torr	Optical transparency	Brittle	Optical diagnostics
Titanium	10⁻⁹ Torr	UHV clean	Expensive	Special UHV chambers

Recommendation for most users:
➡ 304 stainless steel (best cost-performance & vacuum compatibility)

Step 2 — Select Vacuum Ports & Flange Standards

Most common standards:

KF / NW (quick clamp; good for 10⁻³–10⁻⁶ Torr)
ISO (large ports, medium vacuum)
CF (ConFlat) (copper gasket; supports UHV <10⁻⁸ Torr)

Rule of thumb:

Thin-film systems → KF + CF mix
Plasma tools → KF ports for feedthroughs
UHV or XPS → CF flanges only

Step 3 — Pump Selection Based on Vacuum Level

Process	Required Vacuum	Recommended Pump
Thermal Evaporation	10⁻⁵–10⁻⁶ Torr	Rotary + Turbo
Sputtering	10⁻³–10⁻⁵ Torr	Rotary + TMP or dry pump
CVD / ALD	1–1000 mTorr	Dry scroll pump
LIBS / Plasma	1–760 Torr	Mechanical pump
UHV	<10⁻⁸ Torr	Turbo + Ion pump

Step 4 — Internal Mounts & Component Layout

A custom chamber may require:

Sample stages
Quartz/sapphire windows
Manipulators
Optical fiber feedthroughs
Electrical feedthroughs (multi-pin)
RF or HV feedthroughs
Heater assemblies
Rotating stages
Mask holders (shadow mask, photomask)
Crucible / evaporation boat mounts

Correct spacing and port placement ensure serviceability & safety.

Step 5 — Optical & Diagnostic Access

Add windows when needed:

Quartz → UV–IR
Sapphire → UV–IR + high strength
ZnSe → IR lasers
MgF₂ → deep UV

Design guidelines:

Avoid line-of-sight deposition onto windows
Add shutters for long lifetime
Use O-ring or CF-mounted windows depending on vacuum level

Step 6 — Safety & Structural Design

✔ Vacuum chamber must withstand atmospheric load

1 atm = 14.7 psi = 101 kPa → a large force on every surface.

✔ Required safety features:

Burst disk
Grounding for HV systems
Thermal cutoffs for heaters
Interlocks for pumps
Water-cooling for high-power sources

Step 7 — What Customers Should Provide for Custom Chamber Orders

To design a chamber, supplier needs:

Target vacuum level
Chamber shape (cylindrical / box / spherical)
Dimensions
Number & placement of ports
Type of ports (KF, CF, ISO)
Internal mounts needed
Pump type used
Materials required (SS304/316, aluminum, quartz, sapphire)
Application (sputtering, evaporation, spectroscopy…)

The more information provided → the faster the design process.

Frequently Asked Questions

Q1. What material is best for vacuum chambers?

304 stainless steel for most research, 316 for corrosive gases, aluminum for optical systems, titanium for UHV.

Q2. Can I add optical windows to my chamber?

Yes — quartz or sapphire windows can be added via KF or CF flanges.

Q3. What pump do I need for thin-film deposition?

Turbo pump + rotary backing pump.

Q4. What information do I need to order a custom chamber?

Dimensions, vacuum level, flange types, internal mounts, and application.

Q5. Can a custom chamber include heaters, feedthroughs, or masks?

Yes — all can be integrated in the design phase.

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